Het Doel van het Oxyde van het yttrium Y2o3

 Y2o3 Doel
1. ) Het sputterende doel van het oxyde:
CEO2, ND2O3, Sm2O3, EU2O3, Gd2O3, Tb4O7, Dy2O3, Ho2O3, Er2O3, TM2O3, Yb2O3, Lu2O3, Sc2O3, Y2O3, Ta2O5, Nb2O5, Ga2O3, V2O5, ZrO2 gesmeerd met Ti, WO3, WO2.9, HfO2, MGO, Al2O3, het Tin van het Indium
2. ) (Boride, Carbide, Nitride, Fluoride, Silicide, Sulfide) sputterend doel
LaB6, ZrB2, CrB2, TiB2, HfB2, Mo2B5, TaB2, NbB2, W2B, WB, VB2
Tic, SiC, WC, WC-Co, WC-Ni, B4C, TaC, ZrC, Cr3C2, HfC, Mo2C, VC
Si3N4, AlN, MILJARD, BN/SiC mengsel, HfN, TaN, NbN, ZrN, Tin, VN
LaF3, CeF3, NdF3, NaF YF3, KF, BaF2, AlF3, LiF, CaF2, SrF3, SrF2, MgF2
CoSi2, Mo5Si3, MoSi2, Ta5Si3, TaSi2, Nb5Si3, NbSi2, CrSi2, Cr3Si, HfSi2, TiSi2, Ti5Si3, ZrSi2, WSi2, VSi2, NiSi V3Si,
CdS, ZnS, ZnS: Mn, In2S3, Sb2S3, PbS, MOS2, TaS2, WS2
3. ) Het sputterende doel van het metaal:
Zilver, AG, Iridium, IRL, Ruthenium, Ru, La, Ce, PR, Nd, Sm, de EU, GD, Tb, Dy, Ho, ER, TM, Yb, Lu, Sc, Y, Silicium, Si, Tellurium, Te, Bismut, Bi, Tin, Sn, Zink, Zn, Borium, B, Lood, Pb, Antimonium, Sb, Chromium, Cr, Kobalt, Co, Aluminium, Al, Nikkel, Ni, Titanium, Ti, Wolfram, W, Molybdeen, Mo, Tantalium, Ta, Niobium, Nb, Zirconium, Zr, Hafnium, HF, Vanadium, V, Germanium, Duitsland, Indium binnen, Koper, Cu, Ijzer, Fe, Mangaan, Mn, Magnesium, Mg
4. ) Het sputterende doel van de legering:
AG-Al, aG-Cu, aG-La, aG-Lu, aG-Mg, al-Sm, aG-Sn, al-AG, al-Cr, al-Cu, al-Dy, al-ER, al-GD, al-Mg, al-Mg-Si, al-Sc, al-Si, al-Si-Cu, al-Sm, al-Ta, al-Ti, al-Mo, al-Nd, al-V, al-Y, al-Yb, Ce-AG, Ce-Cu, Ce-GD, Ce-Sm, Ce-Ti, Steenkool, Maïskolf, Co-Cr, Co-Cr-Al, Co-Cr-Fe, Co-Fe, Co-Fe-B, Co-Fe-Gd, Co-Gd, Co-Ni, Co-Ni-Cr, Co-Tb, Co-V, Co-Zr, Cr-Al, Cr-B, Cr-Cu, Cr-Mn, Cr-Ni, Cr-Si, Cr-V, Cu-Al, Cu-Ga, Cu-Ge, Cu-In, Cu-Ni, Cu-Zn, Dy-Fe, Dy-Co, Dy-Fe-Co, Fe-Al, Februari, Fe-Co, Fe-GD, Fe-HF, Fe-Mn, Fe-Ni, Fe-Si, GD-Ce, GD-Fe, GD-Fe-Co, GD-ER-Si, GD-Tb, GD-Ti, ho-Cu, HF-Fe, HF-Y, in-Sb, in-Sn, in-Zn, LaB6, La-Al, La-Ni, Mg-Al, Mg-Ca, Mg-Dy, Mg-GD, Mg-binnen, Mg-Nd, Mg-Nd-Zr-Y, Mg-Sc, Mg-Sm, Mg-Y, Mg-Zr, Mn-Fe, Mn-Ni, Mo-Cr, Mo-Si, Nb-Ti, ND-AG, ND-Fe-B, Nial, Ni-Cu, Ni-Cr, Ni-Cr-Al, Ni-Cr-Si, Ni-Fe, Ni-Mn, Ni-Ti, Ni-V, Ni-V-Zr, NiYb, Ni2Yb, Ni3Yb, Ni-Yb, Ni-Zr, Sc-Ni, Sc-Zr, Sm-Co, Sm-Fe, sm-Zr, Ta-Al, Ti-Al, Ti-Al-Cr, Ti-Al-Y, Ti-Al-V, Ti-Co, Ti-Cr, Ti-Ni, Ti-Si, TiSi2, Ti-Zr, tb-Dy, tb-Dy-Fe, tb-Fe, tb-Fe-Co, tb-GD-Fe-Co, v-Al, v-Co, v-Cr, v-Cu, v-Fe, v-Mo, v-Ni, v-Ti, v-Ti-Al, w-Ti, w-Si, Y-Ti, Y-Zr, Y-Zr-Mg, Zn-Al, Zr-Al, Zr-CE, Zr-Cu, Zr-Gd, Zr-Si, Zr-Ti, Zr-Y
DE MATERIALEN VAN DE VERDAMPING
La2O3, CEO2, Pr6O11, ND2O3, Sm2O3, Gd2O3, Dy2O3, Er2O3, Sm2O3, Yb2O3, Y2O3, LaF3, CeF3, PrF3, NdF3, SmF3, GdF3, DyF3, ErF3, YbF3, ScF3, YF3, HfO2, CaF2, ZnS, CdS, SiO2, HfO2, ZrO2, TiO2, TiO, Ti2O3, Ti3O5, Ta2O5, Nb2O5, SiO2, Al2O3, MGO, ZnO, WO3, Bi2O3, Sb2O3, Cr2O3, NiO, CuO, Fe2O3, V2O5, BaTiO3, SrTiO3, PrTiO3, LaTiO3, MgF2, BaF2, SrF3, CaF2, NaF KF, ZnS, CdS, ZnSe.